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非接触式光纤外差干涉位移传感器是将半导体激光器线性调频技术和光纤传感器技术相结合制成的一种新型外差干涉仪。本文利用三角波对半导体激光器进行调频,实现微位移测量。与其它调频方式相比,具有下列特点:1)提高了灵敏度;(2)提高了响应速度。
The non-contact optical fiber heterodyne interference displacement sensor is a new type of heterodyne interferometer which is a combination of semiconductor laser chirp and optical fiber sensor technology. In this paper, the use of triangular wave of the semiconductor laser FM, micro-displacement measurement. Compared with other frequency modulation methods, it has the following features: 1) improved sensitivity; (2) improved response speed.