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本文报道了一种新型的ＣＣＤ光谱仪的研制，包括三部分：即ＣＣＤ光探测器，光路系统，与计算机联接的控制和数据采集系统。该光谱仪的分辨率为０．０３５ｎｍ，灵敏光谱范围４００～９００ｕｒｎ。光谱仪操作简便，可对复杂光谱进行快速处理，已成功地应用于低温等离子体的光谱诊断，获得了很好的测量结果。
This paper reports the development of a new type of CCD spectrometer, which consists of three parts: the CCD photodetector, the optical system and the control and data acquisition system connected with the computer. The spectrometer has a resolution of 0.035nm and a sensitive spectral range of 400 ~ 900urn. The spectrometer is easy to operate and can process complex spectra rapidly. It has been successfully applied to the spectroscopic diagnosis of low-temperature plasma and has obtained good measurement results.