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对于静电驱动的亚微米及纳米尺度的谐振器,衍射效应将会使其驱动及振动频率的光学检测变得更加困难,为克服衍射效应的影响,设计、制作了新型纳机电谐振梁——H型梁,使其产生高频振荡.并制作了双端固支谐振器以进行比较.2种谐振梁的最小宽度和厚度分别为180和200nm.对这2种结构的机械振动特性进行了实验研究.谐振器的基波振荡频率在6.8～20MHz之间,远低于理论预估值.通过模拟仿真发现,过腐蚀是导致振动频率低于理论值的重要原因之一.实验还发现:2种谐振器的谐振频率之差随着梁的长度增加而下降;在室温下减小样品腔的压强后,谐振器的品质因数可以大大提高.
For the electrostatic driven sub-micron and nano-scale resonators, the diffraction effect will make the optical detection of the driving and vibration frequency more difficult. In order to overcome the influence of the diffraction effect, a novel nanomechanical resonant beam, H Type beam to produce high-frequency oscillation, and a double-ended fixed-resonator was fabricated for comparison.The minimum width and thickness of the two kinds of resonant beams were 180 and 200 nm respectively.The mechanical vibration characteristics of these two structures were tested The fundamental oscillation frequency of the resonator is between 6.8MHz and 20MHz, which is much lower than the theoretical prediction value.It is found through simulation that overcorrosion is one of the important reasons for the vibration frequency lower than the theoretical value.Experiments also found that: 2 The difference between the resonant frequencies of the resonators decreases as the length of the beam increases; the quality factor of the resonator can be greatly increased by reducing the pressure in the sample chamber at room temperature.