论文部分内容阅读
真空镀膜技术广泛应用于现代科学技术的很多领域。起初最主要用于光学薄膜。最典型的方法是采用真空蒸发法将成膜材料按设计要求淀积在工件表面从而获得所需的反射、增透、截止、带通、偏振等效果。随着科学技术和生产的发展,真空镀膜技术飞速进步,日益完善,真空镀膜技术已从以真空热蒸发法为主要手段的情况发展成包括电子束加热蒸发、溅射、离子镀、激光蒸发以及各类化学气相沉积等许多各
Vacuum coating technology is widely used in many fields of modern science and technology. At the beginning of the most important for the optical film. The most typical method is to use the vacuum evaporation method to deposit the film-forming material on the surface of the workpiece according to the design requirements so as to obtain the required effects of reflection, penetration enhancement, cut-off, band-pass and polarization. With the development of science and technology and production, the rapid progress of vacuum coating technology has been perfected. The vacuum coating technology has evolved from vacuum thermal evaporation method to electron beam evaporation, sputtering, ion plating, laser evaporation and Various types of chemical vapor deposition and many others