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介绍了真空电子束熔炼炉提纯原理、主要技术参数、设备结构及特点。该设备是冶金法制备太阳能级多晶硅技术中的关键设备,已应用到了国内多家单位工业化生产中,每炉产量为750 kg,单台设备每天产量为2250 kg,通过检测,硅料中磷的含量由6 ppm降到了≤0.1 ppm,达到了太阳能级多晶硅对磷含量的要求。
Introduced the vacuum electron beam melting furnace purification principle, the main technical parameters, equipment structure and characteristics. This equipment is the key equipment in metallurgical preparation of solar grade polysilicon technology and has been applied to many domestic units in industrialized production. The output per furnace is 750 kg, and the daily output of a single unit is 2250 kg. Through testing, The content is reduced from 6 ppm to ≤ 0.1 ppm, reaching the requirement of solar grade polysilicon for phosphorus content.