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研究了八氟环丁烷(OFCB)等离子体改性聚三甲基甲硅烷基丙炔(PTMSP)膜的气体透过性及等离子体处理条件对膜透气性的影响。改性膜的氧氮选择性有了显著提高。处理条件为功率250W,单体压力5.2 Pa,处理时间5min,膜的氧气透过系数和氧氮选择系数分别为1020 barrer和4.18。改性膜的表面组成用XPS谱进行了表征。XPS谱分析表明,改性膜表面形成了含氟致密薄层,氧氮选择性与F/C元素比没有直接关系。
The gas permeation and plasma treatment conditions of OFCB plasma-modified polytrimethylsilyl propyne (PTMSP) membrane were investigated. Modified oxygen and nitrogen selectivity has been significantly improved. The treatment conditions were power 250 W, monomer pressure 5.2 Pa and treatment time 5 min. The membrane oxygen permeability coefficient and oxygen nitrogen selectivity coefficient were 1020 barrer and 4.18, respectively. The surface composition of the modified membrane was characterized by XPS spectroscopy. XPS spectrum analysis showed that a dense fluorine-containing layer was formed on the surface of the modified film. The selectivity of oxygen and nitrogen was not directly related to the F / C ratio.