论文部分内容阅读
本文首次采用了Rayleigh－Ritz方法来分析微机械中经常采用的多层膜结构（混合结构）定子的固有振动特性．研究了平面内应力（in－planestress）和弯曲应力（flexuralstress）对固有频率的影响．模拟计算和实验结果符合得较好．此外还讨论了定于有关参数对固有频率的影响．
This paper, for the first time, uses the Rayleigh-Ritz method to analyze the inherent vibration characteristics of stators in multi-layer film structures (hybrid structures) that are commonly used in micromechanics. The effect of in-plane stress and flexural stress on the natural frequency was investigated. The simulation results are in good agreement with the experimental results. In addition, the influence of the relevant parameters on the natural frequency is also discussed.