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由于表面加工质量的不断提高，对微观形貌测量技术提出了更高的要求。传统触针式轮廓仪测量具有稳定、可靠、测量动态范围大等优点，但会划伤被测表面；而非接触式形貌测量技术克服了接触式测量易划伤表面的缺点，它主要包括光学散射法、各种光探针法、光学显微干涉法以及采用ＳＥＭ、ＳＴＭ、光子隧道显微镜和原子力显微镜（ＡＦＭ）来探测表面微观形貌的方法。各种测量方法均有其优点和局限性。光学测量方法由于受衍射限制，使其横向分辨率很难提高，在测量大斜率及台阶表面时，测量误差很大。而ＡＦＭ被公认为是一种理想的表面微观形貌测量方法。此外，在表面微观形貌评定方面，国际上正积极探索各种三维评定参数以取代原来的二维参数。
Due to the continuous improvement of the surface processing quality, higher requirements are put forward for the micro-topography measurement technology. The traditional stylus profiler has the advantages of stability, reliability and large dynamic range of measurement, but it will scratch the surface to be measured. The non-contact profilometry overcomes the shortcomings of the contact-type scratch surface, which mainly includes Optical scattering method, various optical probe methods, optical microscopic interference method and the method of using SEM, STM, photon tunneling microscope and atomic force microscope (AFM) to detect the surface micro-morphology. Various measurement methods have their advantages and limitations. Optical measurement methods due to diffraction constraints, it is difficult to improve the lateral resolution, the measurement of large slope and the step surface, the measurement error is large. The AFM is widely recognized as an ideal method of measuring the surface topography. In addition, in the aspect of surface micro-topography evaluation, various three-dimensional evaluation parameters are actively explored in the world to replace the original two-dimensional parameters.