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一、引言现代科学遇到了识别与观察大尺寸、大面积的微观世界,以分子或原子的形态呈现出其表面结构。用以测量、加工和修整高集成化的硅片,定位精度达0.1μm;识别高密集度、大信息量的天文宇宙及生物图象,定位精度达0.01μm;测量表面粗糙度至1nm,要求的分辨力高达0.1nm。当前微型机械发展方兴未艾,微型传感器、陶瓷与硅片的加工和检测技术要求纳米级精度。为此,需要研制一种新型大位移高精度的分子测量机,以满足高精测量和超微加工的需要,为迅速崛起的纳米技术服务。
I. INTRODUCTION Modern science has encountered the identification and observation of large-scale, large-scale microscopic worlds, showing their surface structures in the form of molecules or atoms. For the measurement, processing and finishing of highly integrated silicon, positioning accuracy of 0.1μm; recognition of high-intensity, large amount of information astronomical universe and biological images, positioning accuracy of 0.01μm; measuring the surface roughness to 1nm, the requirements The resolution of up to 0.1nm. The current development of micro-machinery in the ascendant, micro-sensors, ceramic and wafer processing and testing technology requires nano-precision. Therefore, it is necessary to develop a new type of large-displacement and high-precision molecular measuring machine to meet the needs of high-precision measurement and ultra-micromachining and serve the rapidly emerging nanotechnology.