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针对有机半导体材料的蒸发温度低的特点,设计并制作了低温辐射式加热器和衬底加热器。低温辐射式加热器能有效的克服传统加热源在制备有机半导体薄膜过程中的缺点。衬底加热器也能明显的改善有机半导体薄膜的表面形貌。采用低温辐射式加热器和衬底加热器对有机半导体材料进行蒸发或溅射镀膜能够取得良好效果。其制作成本低,加热效率高,同时又能提高原有设备功效,在教学和科研生产中有着广泛的应用前景。
In view of the low evaporation temperature of organic semiconductor materials, low temperature radiant heaters and substrate heaters are designed and fabricated. Low-temperature radiant heaters can effectively overcome the shortcomings of traditional heat sources in the preparation of organic semiconductor films. The substrate heater can also significantly improve the surface morphology of organic semiconductor films. The use of low-temperature radiant heaters and substrate heaters on the organic semiconductor material evaporation or sputtering coating can achieve good results. Its low production cost, high heating efficiency, while improving the effectiveness of the original equipment, teaching and research production has a wide range of applications.