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对于某些高精度的测量和精密加工,要求大位移量(50mm)、超微动量(纳米级)、且快速(1mm/sec)的定位驱动装置,以使滑架实现纳米精度的扫描和位移控制。我们已设计制造了“匀速压电马达”(CVPM),它是由两组夹紧器和两组促动器所组成,采用了双压电晶体片。按照交替的“推一拉”方法,并采用了闭环控制补偿其非线性运动误差,实现了连续直线微位移。本文阐述了压电马达的连续微动原理、结构特性、双压电晶片的设计,以及马达效率的计算。
For some high-precision measurement and precision machining, large displacement (50mm), nanometer (nanometer), and fast (1mm / sec) positioning drive are required to allow the carriage to achieve nanometer-accurate scanning and displacement control. We have designed and manufactured the CVPM, which consists of two sets of clamps and two sets of actuators, using bimorphs. According to the alternating “push-pull” method, a closed-loop control is used to compensate for the nonlinear motion error and a continuous linear micro-displacement is achieved. This article describes the principle of continuous fretting of piezoelectric motors, the structural characteristics, the design of bimorphs, and the calculation of motor efficiency.