论文部分内容阅读
最近上海第二光学仪器厂研制成功了FB—Ⅰ型精密接触式翻版机,该翻版机是大规模集成电路生产过程中的关键设备。该项目的研制任务是国家仪器仪表工业总局下达的重点项目之一。于81年9月在上海进行了国家鉴定。参加这次鉴定会的有中国科学院技术科学部、国家仪表工业总局、上海市科委、上海市仪表局等领导部门,有大专院
Recently, Shanghai No. 2 Optical Instrument Factory successfully developed the FB-Ⅰ precision contact type replicator which is the key equipment in the production of large scale integrated circuits. The project’s development mission is one of the key projects issued by the State General Administration of Instrumentation. In September 81, a national appraisal was conducted in Shanghai. To participate in the appraisal will have the Chinese Academy of Sciences Department of Science and Technology, State Instrument and Industry Administration, Shanghai Science and Technology Commission, Shanghai Instrument Bureau and other leading departments, colleges