论文部分内容阅读
本文提出了会聚误差影响分辨率的一种数学分析方法。利用有效光点尺寸的增量,借助于简单的公式,来表达分辨率的损失。
This paper presents a mathematical analysis of the influence of convergence error resolution. With the increase of the effective spot size, the loss of resolution is expressed by means of a simple formula.