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本文采用时域有限差分（ＦＤＴＤ）方法对单片微波集成电路（ＭＭＩＣ）中的开路、短路共面结构进行了全波三维电磁模拟分析，在简要介绍ＦＤＴＤ方法的基础上，给出了截断后的开路、短路共面结构的附加等效长度、导体厚度以及中心导体带宽度等结构参数与理论设计中相应的等效电容和等效电感之间的关系公式，同时还给出了不同结构参数下的附加等效长度与工作频率之间的关系曲线。计算机模拟后的数值分析结果表明，文中所采用的分析方法和计算公式，对今后单片微波集成电路中有关截断型共面结构的等效电容、等效电感以及谐振腔的整体结构设计和理论分析是十分有益的。
In this paper, the full-wave three-dimensional electromagnetic simulation of open-circuited and short-circuited coplanar structures in monolithic microwave integrated circuits (MMICs) is carried out by using FDTD method. Based on the brief introduction of FDTD method, Open circuit, short circuit coplanar structure of the additional equivalent length, the thickness of the conductor and the center conductor width and other structural parameters and theoretical design equivalent capacitance and equivalent inductance between the formula, but also gives the different structural parameters Under the additional equivalent length and operating frequency of the relationship between the curve. The results of numerical simulation after computer simulation show that the analytical methods and calculation formulas adopted in this paper are of great importance to the design and theory of the overall structure, equivalent inductance and equivalent cavity of the resonant cavity in future monolithic microwave integrated circuits Analysis is very useful.