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为研究高频环境下的二次效应,建立了SAW传感器叉指谐振器(IDT)的二维周期有限元模型.以YX128°-LiNbO3高频SAW传感器为分析对象,定量分析了不同电极设计参数下的电极二次效应;通过谐响应分析,得到了传感器IDT电学导纳与传感器中心频率的关系,提取了IDT的谐振频率和逆谐振频率.结果表明,随着敷金比MR或电极高度EH的增大,表面波的模态频率降低,相应的表面波的速度也会降低.相同电极高度下,随着敷金比的增大,频率截止带逐渐变宽,对应的电极反射率逐渐变大.仿真提取的谐振频率为973MHz,逆谐振频率为1002MHz.
In order to study the quadratic effect in high frequency environment, a two-dimensional periodic finite element model of SAW sensor IDT is established. Taking YX128 ° -LiNbO3 high-frequency SAW sensor as the analysis object, the design parameters of different electrodes The relationship between the IDT’s electric admittance and sensor’s center frequency was obtained by harmonic response analysis and the resonant frequency and anti-resonance frequency of IDT were extracted.The results show that with the increase of MRD or EH The frequency of the surface wave decreases and the corresponding surface wave velocity decreases.With the increase of the gold deposition ratio, the frequency cutoff band becomes wider at the same electrode height, and the corresponding electrode reflectivity becomes larger gradually. The simulated resonance frequency is 973MHz and the anti-resonance frequency is 1002MHz.