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基准源是加速度计系统中的重要组成部分,随着科技的发展,对加速度计的性能要求越来越高,而基准源的精度直接影响着加速度计的性能。因此,文章在传统带隙电压源的原理基础上提出了一种适用于高精度微加速度计的基准电压源。此基准电压源采用分段线补偿原理,有效降低了温度系数,在很大程度上改善了基准电压源的性能。文中提供的电路采用上华的0.5μmCMOS工艺设计而成。在电源电压为5V的情况下,用Hspice仿真结果表明,该基准电压源产生2.5V的输出电压,低频时基准电压源输出的电源抑制比是-73dB。在-40℃到175℃的温度变化范围内温度系数为7.975×10-6/℃。
The reference source is an important part of the accelerometer system. With the development of science and technology, the performance requirements of the accelerometer are getting higher and higher, and the accuracy of the reference source directly affects the performance of the accelerometer. Therefore, based on the principle of traditional bandgap voltage source, this paper presents a reference voltage source suitable for high precision micro-accelerometer. The reference voltage source using piecewise line compensation principle, effectively reducing the temperature coefficient, to a large extent improved the performance of the reference voltage source. The circuit provided by the Chinese on the 0.5μmCMOS process design. When the power supply voltage is 5V, the Hspice simulation results show that the reference voltage source produces an output voltage of 2.5V, and the power supply rejection ratio of the reference voltage output at low frequency is -73dB. The temperature coefficient in the temperature range of -40 ° C to 175 ° C is 7.975 × 10 -6 / ° C.