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袅1各种干法腐蚀一_-一一一一参数和电极结构 ～瑚……隧翳压罄围卜极结构怿躅懈1豢纛桶形腐蚀或隧道形 腐蚀顺流或支流等离子 腐蚀高压腐蚀等离子腐蚀(PE)离子腐蚀(IE)或 溅射腐蚀反应离子腐蚀(RIE)或反应溅射腐蚀磁场限制离子腐蚀 (MIE)磁场限制反应离子腐蚀(MRIE)三极管腐蚀
A variety of dry etching a _1111 parameters and electrode structure ~ coral ...... Tunnel pressure exhausted Wai BU pole structure 怿 躅 slack 1 豢 纛 Barrel corrosion or tunnel corrosion Corrosion downstream or tributary plasma high pressure Corrosion Plasma Corrosion Ionization (IE) or Sputter Corrosion Reactive Ion Etching (RIE) or Reactive Sputtering Corrosion Magnetic Field Limiting Ion Etching (MIE) Magnetic Field Limiting Reactive Ion Etching (MRIE) Triode Corrosion