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综述了国内外TiO_2气体传感器的发展状况、工作原理以及不同类型的TiO_2传感器。徽电子加工技术和薄膜技术的引人,为实现气体传感器小型化、集成化、高灵敏度化提供了重要手段。
The development status, working principle and different types of TiO_2 sensors of TiO_2 gas sensors at home and abroad are summarized. Emblem electronic processing technology and the introduction of thin-film technology, to achieve the gas sensor miniaturization, integration, high sensitivity provides an important means.