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采用直流磁控溅射法在Ti6Al4V表面制备TiN/Ti复合膜。分别用FESEM、GDEOS和XRD分析薄膜表面的成分及相结构;利用划痕仪分析膜基结合强度;通过球盘磨损机和轮廓仪测试磨痕形貌和磨损体积,评价膜层的摩擦学性能。结果表明,TiN/Ti复合膜表面致密光滑,呈金黄色金属光泽;膜基结合强度大于100 N;表面镀有TiN/Ti复合膜的Ti6Al4V合金虽没有减磨作用,但提高了耐磨性。
TiN / Ti composite films were prepared on Ti6Al4V by DC magnetron sputtering. The composition and phase structure of the film surface were analyzed by FESEM, GDEOS and XRD respectively. The bond strength of the film was analyzed by a scratch tester. The tribological properties and wear volume of the film were evaluated by ball mill wear tester and profile analyzer. . The results show that the surface of TiN / Ti composite film is dense and smooth with golden yellow metallic luster; the bond strength of film base is greater than 100 N; Ti6Al4V alloy coated with TiN / Ti composite film does not reduce the wear resistance but improves the wear resistance.