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利用Monte Carlo(MC)模拟技术研究了非均一的吸附原子与基底相互作用能在一定的生长条件下对超薄膜生长过程的影响.非均一相互作用能是由基底表面原子在垂直和水平方向上实际位置与理想晶格原子位置的偏差所造成.本文用高斯分布来表示这种非均一相互作用能.模拟结果表明:非均一相互作用能对超薄膜的生长过程及薄膜的形貌有显著的影响.这种影响同时受到生长条件的限制,在中等温度时相互作用能的非均一性对岛的个数、平均大小的影响最显著;温度的增加在一定程度上可抵御相互作用能的非均一性对薄膜生长的影响.
Monte Carlo (MC) simulation technique was used to study the effect of heterogeneous adsorption-substrate-substrate interactions on the growth of ultra-thin films under certain growth conditions. The heterogeneous interaction energy is determined by the interaction of atoms on the substrate surface in vertical and horizontal directions The actual position and the position of the ideal lattice atoms caused by the deviation.This paper uses Gaussian distribution to represent this heterogeneous interaction energy.The simulation results show that the heterogeneous interaction can have significant effects on the growth process and the morphology of the films This effect is also limited by the growth conditions at the same time, and the heterogeneity of interaction energy has the most significant influence on the number and average size of island at medium temperature. The increase of temperature can resist the interaction energy to a certain extent Effect of homogeneity on film growth.