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薄膜电阻真空计的测量范围为1托～1000托,线性测量,测量精度优于5％,为全压强测量,测量值受被测气体种类影响较小。一、引言利用集成电路平面工艺在硅膜片上制作四个等值电阻,组成惠斯登电桥。硅膜片在不受力时,电桥处于平衡状态,电桥没有电压输出。硅膜片受到压力时,由于压阻效应,电桥处
Membrane resistance vacuum gauge measuring range of 1 torr ~ 1000 Torr, linear measurement, measurement accuracy of better than 5%, for the total pressure measurement, the measured value is less affected by the type of gas under test. I. INTRODUCTION The use of integrated circuit planar technology in the silicon film on the production of four equivalent resistance, composed of Wheatstone bridge. When the silicon diaphragm is unstressed, the bridge is in equilibrium and the bridge has no voltage output. The silicon diaphragm is under pressure due to the piezoresistive effect at the bridge