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设计了一种使用良好的石墨舟 ,建立了一套能进行开管液相外延的系统 ,并利用此系统在 Cd Zn Te衬底上和在富 Te的生长条件下生长了不同 x值的 Hg Cd Te外延薄膜 .通过对外延生长工艺的控制 ,外延薄膜的表面形貌有很大的改善 ,残留母液大为减少 ,外延薄膜的组分比较均匀 ,其电学性能得到较大改善 ,Hg Cd Te外延薄膜与Cd Zn Te衬底之间的互扩散非常少 ,外延膜的晶体结构也较完整 .
A well-designed graphite boat was designed to establish a system capable of conducting open-tube liquid-phase epitaxy and using this system to grow Hg with different x-values on a Cd Zn Te substrate and under Te-rich growth conditions CdTe epitaxial thin film.The surface morphology of the epitaxial thin film is greatly improved by controlling the epitaxial growth process, the residual mother liquor is greatly reduced, the composition of the epitaxial thin film is relatively uniform, and the electrical property is greatly improved. The Hg Cd Te The interdiffusion between the epitaxial film and the Cd ZnTe substrate is very small, and the crystal structure of the epitaxial film is relatively complete.