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一、前言离子散射(ISS)在科学发展史上有重要的地位。50年代初离子散射法开始在表面研究中应用。1951年Brown等提出,在MeV范围的高能离子散射(HEISS)可用以确定固体表面杂质浓度。但高能散射离子携带的信息终究以体相的为主,限制了HEISS在表面分析上的应用。60年代末及70年代初,使用较低能置(≤2keV)的离子散射谱(LEISS或ISS)受到表面科
I. Introduction Ion Scattering (ISS) has an important position in the history of scientific development. The early 50s ion scattering began to be used in surface studies. Brown et al. Proposed in 1951 that high-energy ion scattering (HEISS) at the MeV range can be used to determine the solid surface impurity concentration. However, the information carried by high-energy scattering ions is dominated by the bulk phase, which limits the application of HEISS in surface analysis. In the late 1960s and early 1970s, ion scattering spectra (LEISS or ISS) with lower energy (≤2 keV)