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采用磁控溅射技术在聚二甲基硅氧烷(PDMS)上制备金属褶皱结构,有效地解决了柔性结构发生形变时电阻值发生较大改变甚至失效的问题。研究了不同溅射时间对金属褶皱结构周期及高度的影响,并对金属褶皱结构的电学性能进行测试。利用原子力显微镜分析表征柔性衬底上金属褶皱结构的表面形貌,利用数字万用表进行样品表面电阻值的测量。测试结果表明:随着溅射时间的增加,金属褶皱结构的周期和高度都呈增大趋势,电阻增长率变得缓慢,对信号的响应程度也越来越小。
The magnetron sputtering technique was used to fabricate the metal wrinkle structure on polydimethylsiloxane (PDMS), which effectively solved the problem that the resistance value changed or even failed when the flexible structure was deformed. The effects of different sputtering times on the period and height of the metal fold structure were studied, and the electrical properties of the metal fold structure were tested. The surface morphology of the metal wrinkle structure on the flexible substrate was characterized by atomic force microscopy and the surface resistance of the sample was measured by a digital multimeter. The test results show that with the increase of sputtering time, the period and height of the metal wrinkle structure increase, the rate of resistance increase becomes slow and the response to the signal becomes smaller and smaller.