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采用脉冲激光沉积方法在单晶LaAlO3(100)平衬底和15°倾斜衬底上制备La0.72Ca0.28MnO3薄膜。在镀膜过程中分别采用溶胶-凝胶法和共沉淀法制备靶材。研究不同方法制备的靶材和相应的薄膜的结构、电输运性能和表面形貌。与共沉淀法相比,采用溶胶-凝胶法制备的靶材具有更加均匀的组分和更大的致密度以及晶粒尺寸,因此具有更高的绝缘体-金属转变温度和更大的电阻温度系数。采用溶胶-凝胶靶材制备的薄膜,其晶粒尺寸更均匀、生长质量更好,绝缘体-金属转变温度高20 K,激光感生电压也更大。因此,使用溶胶-凝胶方法制备靶材可以大幅提高脉冲激光沉积方法中薄膜的性能。
La0.72Ca0.28MnO3 thin films were prepared on single crystal LaAlO3 (100) flat substrates and 15 ° inclined substrates by pulsed laser deposition. In the coating process were used sol - gel method and coprecipitation method to prepare the target. The structure, electrical transport properties and surface morphology of target and corresponding films prepared by different methods were studied. Compared with the coprecipitation method, the target prepared by the sol-gel method has a more uniform composition and greater density and grain size, and therefore has a higher insulator-metal transition temperature and a larger temperature coefficient of resistance. Films prepared with a sol-gel target have a more uniform grain size and better quality of growth. The insulator-to-metal transition temperature is 20 K and the laser induced voltage is greater. Therefore, the use of sol-gel method to prepare the target can greatly improve the performance of the film in the pulsed laser deposition method.