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光栅作为一种重要的光学器件,不断小型化、商品化的发展趋势要求其制造技术应具有快速批量生产的特点。本文报道了一种以熔融石英光栅为模板,采用传统模压成型技术在光学塑料表面复制浮雕光栅的方法,实现了光栅的高效批量生产,并对复制出来的塑料浮雕光栅进行了光学特性分析。测试了不同温度下复制的塑料浮雕光栅衍射光斑图样、衍射效率和衍射级次的强度分布,重点研究了温度对复制浮雕光栅性能的影响,分析了不同温度下模板材料和光学塑料的热膨胀系数与复制光栅常数之间的关系。将批量复制出的塑料浮雕光栅和模板光栅进行实验比较,结果表明在最佳工艺参数条件下,批量复制出的塑料浮雕光栅与模板光栅相比,光栅常数偏差小于1%,衍射效率偏差小于5%,衍射特性与模板光栅基本一致。
As a kind of important optical device, the grating is becoming more and more miniaturized. The trend of commercialization demands that its manufacturing technology should have fast mass production. In this paper, a method of using fused silica gratings as a template to replicate relief gratings on optical plastic surfaces by using traditional molding technology is presented. High efficiency mass production of gratings is achieved. The optical characteristics of the replicated gratings are also analyzed. The diffraction pattern, diffraction efficiency and diffraction order intensity distribution of the plastic relief grating replicated at different temperatures were tested. The influence of temperature on the properties of replicated relief grating was studied emphatically. The relationship between the thermal expansion coefficient of template material and optical plastic at different temperatures and Copy the relationship between the grating constant. The experimental results show that compared with the template grating, the deviation of the grating constant is less than 1% and the diffraction efficiency deviation is less than 5 under the optimal process parameters %, The diffraction characteristics and the template grating basically the same.