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使用要求离轴椭球镜的面形PV(峰谷)值优于0.4λ(λ=351 nm)。根据三级像差理论球差表达式和补偿检验原理,得出检测光路中球面补偿镜的半径表达式。由已知数据求解补偿光路的初始结构参数,并带入软件中得到优化后的设计结果,优化后的结果和初始结构参数没有变化,说明补偿光路的求解方法是正确的。考虑到元件的加工误差和检测光路的调试误差,将误差带入检测光路进行模拟分析后,得出被检元件的面形精度:取98%的合格概率时,椭球镜的面形PV为0.379λ(λ=351 nm),能够满足使用要求,说明离轴椭球面的反射式补偿检验法是可行的。
The use of off-axis ellipsoid mirror surface shape PV (peak) value better than 0.4λ (λ = 351 nm). According to the third-order aberration theory spherical aberration expression and compensation test principle, the radius of the spherical compensation lens in the detection light path is obtained. The original structure parameters of the compensation optical path are solved by the known data and brought into the software to obtain the optimized design result. The optimized result and the initial structure parameters are unchanged, which shows that the method of solving the compensation optical path is correct. Taking into account the processing error of the component and the debugging error of the detection optical path, after the error is brought into the detection optical path for simulation analysis, the surface shape accuracy of the examined component is obtained: when the pass probability of 98% is taken, the surface shape PV of the ellipsoid mirror is 0.379λ (λ = 351 nm), which can meet the requirements of use. It shows that the off-axis ellipsoid reflection compensation test is feasible.