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相移干涉测量是一种光学精密检测方法．相移器作为其中关键部件，它的性能直接影响计量精度．文中介绍了一种用于相移器标定的方法．该方法采用对连续采集的相移干涉图光强分布函数进行快速傅立叶变换，得到相邻两次位移差，即相移大小，以此来决定压电陶瓷的移动量．此方法标定精度（０．００５μｍ）满足了相移干涉测量的要求，操作简单、计算速度快，且易于实现实时标定处理．
Phase shift interferometry is an optical precision detection method. Phase shifter as one of the key components, its performance directly affects the measurement accuracy. This paper introduces a method for phase shifter calibration. In this method, the fast Fourier transform of the light intensity distribution function of the phase-shifted interferograms acquired continuously is used to obtain the displacement difference between the two adjacent positions, that is, the magnitude of the phase shift, so as to determine the movement of the piezoelectric ceramic. The calibration accuracy of this method (0.005μm) meets the requirements of phase-shift interferometry. It is simple to operate, fast in calculation and easy to implement real-time calibration.