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The distortion correction of a two-dimensional deflection field controlled by D/A system is an important technology for the beam-microfabrication (for example, electronic beam,photon beam, etc.). The key is to deduce an approximate correcting function. Generally the integer function is used.
The distortion correction of a two-dimensional deflection field controlled by D / A system is an important technology for the beam-microfabrication (for example, electronic beam, photon beam, etc.). The key is to deduce an approximate correcting function. the integer function is used.