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一、引言在科技领域中,微电子学占据着越来越重要的地位。在精密光学仪器制造上,也用到微电子技术。八十年代,许多光学仪器的测量、定位和信息处理都应用了微电子技术。大多数仪器采用微电子技术之后,不是使光、机、电分家,而是把微电子学与精密机械学和光学有机地结合起来,使仪器的性能和工作原理得到了新的发展。
I. Introduction In the field of science and technology, microelectronics occupy an increasingly important position. In the manufacture of precision optical instruments, microelectronics are also used. Eighties, many optical instruments measurement, positioning and information processing are the application of microelectronic technology. Most devices use microelectronics technology, not to light, electricity, electricity division, but the microelectronics and precision mechanics and optics organically together, the instrument performance and working principle has been a new development.