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在最近10年里超导量子干涉器件(SQUID)得到了广泛的研究,高温超导体的发现进一步促进了这一器件的发展。几个小组已经报道了利用高T_c SQUID测量心磁的实验结果。然而迄今为止由于尚未解决高T_c线材及其超导连接问题,因而还没有有效地制成高T_c梯度线圈,这无疑限制了它的使用。为此高T_c梯度线圈的研制已成为引人注目的课题。本文报道在SrTiO_3(STO)基片上制备三面高T_c YBa_2Cu_3O_(7-x)(YBCO)超导薄膜的工艺、形貌及超导性能。由于基片上的薄膜在空间中两个端面相互平行通过中间膜彼此连接,因而只要采取适当的光刻技术,就可以制成SQUID磁场梯度计。
The superconducting quantum interference device (SQUID) has been extensively studied in the last 10 years and the discovery of high-temperature superconductors has further contributed to the development of this device. Several groups have reported experimental results of using the high T_c SQUID to measure the magnetocardia. However, up to now, the high Tc wire and its superconducting connection have not been solved yet, so high Tc gradient coils have not been effectively fabricated, which undoubtedly limits its use. For this reason, the development of high T_c gradient coils has become an attractive topic. In this paper, the fabrication, morphology and superconductivity of three-plane superconducting thin films of T_c YBa_2Cu_3O_ (7-x) (YBCO) on SrTiO_3 (STO) substrates are reported. As the film on the substrate in the space between the two ends parallel to each other through the intermediate film connected to each other, so as long as the appropriate lithography technology can be made SQUID magnetic field gradient meter.