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在双波长半导体激光(LD)正弦相位调制(SPM)干涉仪中,通过注入电流调制LD波长的同时,光源的输出光强也被调制,影响了测量精度。提出了一种新的双波长LD SPM干涉仪,通过对干涉信号进行处理,得到与干涉信号相位相关的线性方程组,利用该方程组精确计算相位,消除了光源光强调制的影响,使测量误差由6μm减小至1μm,并利用该干涉仪与波长扫描技术相结合实现了绝对距离的测量,当待测距离为60~280 mm时,测量结果的重复性为1μm。
In the dual-wavelength semiconductor laser (LD) sine phase modulation (SPM) interferometer, the output light intensity of the light source is also modulated by injecting a current to modulate the LD wavelength, which affects the measurement accuracy. A new dual-wavelength LD SPM interferometer is proposed. By processing the interference signal, a linear system of equations related to the phase of the interfering signal is obtained. By using this system, the phase can be accurately calculated and the influence of light intensity modulation can be eliminated. The error is reduced from 6μm to 1μm, and the absolute distance measurement is realized by using the interferometer and the wavelength scanning technology. When the distance to be measured is 60-280mm, the repeatability of the measurement result is 1μm.