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针对MEMS陀螺,基于四阶机电结合ΣΔ调制器技术设计了一款驱动数字闭环电路。其中电容/电压转换电路(C/V转换电路)采用了开关电容电路。为了降低C/V转换电路的噪声,采用了相关双采样(CDS)技术和斩波开关技术。仿真结果表明,采用这两项技术后,C/V转换电路的噪声在1~10kHz附近达到了约20zF/Hz。数字信号处理部分的时钟由锁相环路(PLL)提供,并且片上PLL对陀螺驱动模态谐振频率进行了倍频。采用0.18μmCMOS工艺制作设计的专用集成电路(ASIC)。实验结果表明,驱动闭环电路能够成功起振,电路输出信号的信噪比达到112dB,1h的稳定性达到2.08×10-4。
For MEMS gyroscope, a digital closed-loop circuit is designed based on the fourth-order electromechanical combined with ΣΔ modulator technology. Which capacitance / voltage conversion circuit (C / V conversion circuit) using a switched capacitor circuit. In order to reduce the noise of the C / V conversion circuit, a correlated double sampling (CDS) technique and a chopping switch technique are employed. Simulation results show that with these two techniques, the noise of C / V conversion circuit reaches about 20zF / Hz near 1 ~ 10kHz. The clock in the digital signal processing section is provided by a phase-locked loop (PLL), and the on-chip PLL multiplies the gyro-driven mode resonant frequency. Using 0.18μm CMOS process design ASIC (ASIC). Experimental results show that the closed-loop drive circuit can be successfully started, the signal to noise ratio of the circuit output signal reaches 112dB, and the stability of 1h reaches 2.08 × 10-4.