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用反胶束法使SiO2 纳米粒子与感光聚酰亚胺溶液混合 ,制备纳米复合感光材料。用偏光显微镜表征了复合材料的光刻能力及形貌 ,用红外光谱表征了复合材料的结构 ,用DSC测定了复合材料的玻璃化转变温度。
The reverse micelle method is used to make the SiO2 nano-particles and the photosensitive polyimide solution mixed to prepare the nano-composite photosensitive material. The photolithographic properties and morphology of the composites were characterized by polarized light microscope. The structure of the composites was characterized by infrared spectroscopy. The glass transition temperature of the composites was measured by DSC.