Optimization of a guided-mode resonance filter by varying the thickness of the buffer layer

• 作 者: HsiangI.Hsu Po-TsungWu andCheng-ShengHuang
• 机 构: DepartmentofMechanicalEngineering,NationalChiaoTungUniversity,Hsinchu30010,China
• 出 处: ChineseOpticsLetters
• 发表日期: 2016年14期
• 关键词: 050.6624 130.7408 280.4788 350.2770

In this Letter, we demonstrate that by adjusting the thickness of the buffer layer, the optical responses of a guided-mode resonance filter (GMRF) can be improved for sensor applications. The GMRF is fabricated using a replica molding with a plastic substrate and a UV-curable polymer. SiO2 buffer layers of different thicknesses are deposited before the waveguide-layer deposition. The sensitivity of the GMRFs decreases slightly with increasing SiO2 layer thickness. By contrast, the full width at half-maximum reduces substantially with increasing SiO2 layer thickness, resulting in the improvement of the overall figure of merit.