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为了研究脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响,搭建了脉冲激光电化学复合沉积实验系统,并进行了理论分析和实验验证。对沉积过程中的冲击效应进行了检测,采用扫描电子显微镜观察沉积体的表面形貌。结果表明,利用脉冲激光与电沉积液的相互作用,可细化定域电沉积晶粒。此外,激光能量增大时,沉积体晶粒细化,宽度增大,沉积体表面形貌更加平整,内部气孔减少。
In order to study the effect of pulsed laser shock on the localized electrodeposited copper grains and their surface topography, a pulsed laser electrochemical deposition experiment system was set up, and theoretical analysis and experimental verification were carried out. The impact of the deposition process was tested, the surface morphology of the deposit was observed by scanning electron microscopy. The results show that by using the interaction between pulse laser and electrodeposition solution, the localized electrodeposited grains can be refined. In addition, the laser energy increases, the grain refinement of the deposit, the width increases, the surface morphology of the deposit more smooth, reduced internal pores.