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用粉末冶金方法制造难熔金属钨硅化物,研究自传播高温合成技术制取钨硅的包复粉末,讨论了它的制造工艺参数及其理化性能的测定。制造出了高纯度的难熔金属钨硅化物溅射靶材,为国产系列溅射靶材增添了新品种。
The refractory metal tungsten silicide was fabricated by powder metallurgy method. The self-propagating high-temperature synthesis technology was used to prepare tungsten-silicon coated powder, and its manufacturing process parameters and physical and chemical properties were discussed. Created a high-purity refractory metal tungsten silicide sputtering target, adding a new variety of domestic series of sputtering targets.