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辉光放电型溅射中性粒子质谱(SMMS)是当今表面分析中值得推广应用的一种新技术。它通过放电等离子体中的离子溅射样品表面,产生溅射中性粒子,然后用质量分析器分析后电离的中性粒子,因而它与AES和SIMS相比,由于没有基体效应以及各种元素间的相对灵敏度比较均一,因而更易于定量。 本文介绍了我们研制的这套SMMS系统,详述了这套系统的工作原理以及结构特点。该系统的离子源采用射频放电形式,因而它既能分析导体、半导体,又能分析绝缘体;它不仅能够进行固体和薄膜表面的成份分析,而且能够进行深度剖面分析。
Glow discharge sputtering neutral mass spectrometry (SMMS) is a new technique worthy of promotion in today’s surface analysis. It sputters the sample surface with ions in the discharge plasma to produce sputtered neutrals and then analyzes the post-ionized neutrals with a mass analyzer so that it has no matrix effect and a variety of elements compared to AES and SIMS The relative sensitivity between the more uniform, and therefore easier to quantify. This article describes the SMMS system that we developed and details the working principle and structural features of the system. The system’s ion source uses radio-frequency discharge to analyze both conductors, semiconductors and insulators; it can perform component analysis not only on solid and film surfaces, but also on depth profiles.