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本研究利用射频溅射法制备了垂直磁记录用正CoCr单层膜及NiFe/CoCr双层膜。研究了溅射压力Prf、基板温度Tsb对CoCr合金层(002)面△θ50角,矫顽力Hc⊥、Hc∥有效各向异性场HK*及正方比S⊥、S∥的影响。可以控制溅射条件使单层CoCr膜(002)面△θ50在5°以内,双层膜CoCr层△θ50在10°以内,而在较宽的范围内调整Hc⊥、Hc∥值。选择一定溅射条件制备了NiFe/CoCr双层膜软盘,并利用市售普通纵向记录的51/4英寸软盘机驱动装置及其环形磁头对该盘进行了读写实验,表明可以实现垂直方式的写入和读出。
In this study, a positive CoCr single layer film and a NiFe / CoCr double layer film for perpendicular magnetic recording were prepared by radio frequency sputtering. The effects of sputtering pressure Prf and substrate temperature Tsb on the Δθ50 angle, the coercive force Hc⊥, the Hc∥ effective anisotropy field HK * and the square ratio S⊥, S∥ of the (002) plane of CoCr alloy were studied. Sputtering conditions can be controlled so that the Δθ50 of the (002) plane of the single-layer CoCr film is within 5 °, the Δθ50 of the double-layered CoCr layer within 10 °, and the Hc⊥ and Hc∥ values within a wide range. Select a certain sputtering conditions prepared NiFe / CoCr double-layer floppy disk, and the use of commercially available ordinary longitudinal recording 51/4 inch floppy disk drive and its ring head read and write experiments on the disk, indicating that vertical mode Write and read.