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本文研制了基于激光光栅显微投影法的表面微观形貌测量系统。该系统由激光器 ,CCD ,两个显微物镜 ,图象采集卡 ,计算机和数据处理软件组成。两个显微物镜一个用来将光栅进行缩小投影到被测物体的表面上 ,形成被被测物体表面高度所调制的条纹 ;另一只显微物镜则将被调制的条纹图像成像到CCD的靶面上 ,CCD采集的图像输入到计算机中进行相关计算而得出被测表面的微观形貌。本文介绍了该系统的测量范围和分辨率计算方法 ,并对实验数据进行了可靠性分析。结果分析表明 ,该系统能可靠地测量物体的表面微观形貌。
In this paper, a surface micro-morphology measurement system based on laser grating microscopic projection is developed. The system consists of laser, CCD, two microscope objective lens, image acquisition card, computer and data processing software. One of the two micro-objective lenses is used to project the grating onto the surface of the object to be measured to form a stripe modulated by the height of the surface of the object under test. The other microscope objective images the modulated fringe pattern onto the CCD The target surface, the CCD image acquisition input into the computer to calculate the microscopic morphology of the measured surface. This article describes the measuring range and resolution of the system calculation method, and the reliability of the experimental data were analyzed. The results show that the system can reliably measure the surface microstructure of objects.