,Integrated color defect detection method for polysilicon wafers using machine vision

• 作 者: Zai-Fang Zhang Yuan Liu Xiao-Song Wu Shu-Lin Kan
• 机 构: School of Mechatronic and Automation Engineering, Shanghai University, Shanghai 200072, People’s Rep
• 出 处: Advances in Manufacturing
• 发表日期: 2014年04期
• 关键词: Polysilicon wafers Color defect detection Machine vision Fuzzy color cluste

For the typical color defects of polysilicon wafers,i.e.,edge discoloration,color inaccuracy and color non-uniformity,a new integrated machine vision detection method is proposed based on an HSV color model.By transforming RGB image into three-channel