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引言氧化铝陶瓷具有强度高、高频损耗小和热稳定性好等特点,因此在电子工业、航空工业和原子能工业上,广泛地采用各种金属和氧化铝瓷的封接件。随着上述工业的发展对各种封接件的质量要求也越来越高。以往国内外常用的封接方法有烧结金属粉末法、活性合金法等。但是这些方法存在着高频损耗大、抗辐照能力和介电性能低等缺点,已经不能完全满足上述工业发展的需要,希望有更可靠的封接方法提高封接件的工作性能和使用寿命,真空扩散封接工艺是可以克服上述缺点的方法之一。扩散封接可以获得真空气密性好、热稳定性好和绝缘性好的封接组件。常规的陶瓷-金属封接主要是依靠高温产
Introduction Alumina ceramics have the characteristics of high strength, small high-frequency loss and good thermal stability. Therefore, various kinds of sealing materials of metal and alumina ceramics are widely used in the electronics industry, aviation industry and atomic energy industry. With the development of the above industries, the quality requirements of various seals are also getting higher and higher. In the past at home and abroad commonly used sealing methods are sintered metal powder method, active alloy method. However, these methods have the disadvantages of high frequency loss, anti-radiation ability and low dielectric property. These methods can not fully meet the needs of the above industrial development and hope that a more reliable sealing method can improve the working performance and the service life of the sealing member , Vacuum diffusion sealing process is one of the ways to overcome the above shortcomings. Diffusion seal can be vacuum tightness, thermal stability and good insulation of the sealing assembly. Conventional ceramic-metal seals rely primarily on high-temperature production