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前言 自低温技术问世以来用低温抽气方法来获得真空,已为人们所熟悉。低温真空泵是一种捕集式真空泵,泵内有致冷到极低温度的表面,在这个低温面上凝固气体,并使凝结物保持其饱和蒸汽压力低于真空室内所要求的压力,以获得预定的真空状态。低温真空泵低温板的温度选择与被抽气体
Preface Since the advent of cryogenic technology since the advent of low-temperature exhaust method to obtain a vacuum, has been well-known. A cryogenic vacuum pump is a trapping vacuum pump with a surface cooled to an extremely low temperature where the gas is set and the condensate is kept at a pressure below the pressure required in the vacuum chamber to achieve a predetermined The vacuum state. Low temperature vacuum pump cryogenic temperature selection and was pumping body