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本文利用红外显微镜和化学浸蚀的方法,研究了硅单晶中铜沉淀物的几何形态。实验表明,用红外显微镜观察到的各种形态的沉淀物是由{110}面上的片状沉淀组成的,样品的性质对它的形态没有影响。
In this paper, we use infrared microscopy and chemical etching method to study the geometry of copper precipitates in silicon single crystal. Experiments show that the observed by infrared microscopy of various forms of sediment is composed of {110} surface of the plate-like precipitation, the nature of the sample has no effect on its morphology.