Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulat

• 作 者: 何国田 王向朝 曾爱军 唐锋 黄炳杰
• 机 构: Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences,Shanghai Institute of Op
• 出 处: Chinese Optics Letters
• 发表日期: 2007年04期
• 关键词: interferometer modulating sinusoidal speaker demodulation compensation resolve e

To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode (LD) interferometers,a novel real-time displacement measurement LD interferom- etry is proposed and its measurement principle is analyzed.By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping,the measurement accuracy is im- proved,and the measurement range is enlarged to a few wavelengths.In experiments,the peak-to-peak amplitude of the speaker vibration was 2361.7 nm,and the repeatability was 2.56 nm.The measurement time was less than 26μs.

To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode (LD) interferometers, a novel real-time displacement measurement LD interferometer and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is im- proved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 μs.