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利用金属醇盐以溶胶-凝胶方法制备了Sb掺杂SnO2(ATO)薄膜,研究了玻璃基板中Na+离子扩散对薄膜性能的影响及其机理,并进行了在玻璃表面预镀SiO2底膜以防止这种扩散的研究工作,发现预镀SiO2底膜后可以有效地阻止Na+离子的扩散从而改善了ATO薄膜的导电性能
Sb-doped SnO2 (ATO) thin films were prepared by sol-gel method using metal alkoxides. The effects of diffusion of Na + ions on the properties of the thin films and their mechanisms were studied. To prevent this proliferation of research work and found that after pre-plating SiO2 film can effectively prevent the diffusion of Na ions to improve the conductivity of the ATO film