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采用磁控溅射法制备了不同Al含量的Ti1-xAlxN涂层.经XRD,SEM,EDX和纳米压痕仪分析发现,Al含量在0.50~0.58(原子分数,下同)之间时,Ti1-xAlxN涂层为(111)择优生长的fcc结构.当Al含量增加到0.63时,涂层中有六方纤锌矿结构的Al N生成,涂层硬度降低.另外,随着Al含量的增加,涂层表面颗粒尺寸变大,涂层变疏松.钛合金切削实验表明,涂层刀具的磨损形式主要为黏结磨损和崩刃.在低速切削(65 m/min)时,Ti0.50Al0.50N涂层刀具的切削性能略好于无涂层刀具,并且都好于Ti0.42Al0.58N和Ti0.37Al0.63N涂层刀具.在高速切削(100 m/min)时,Ti0.50Al0.50N涂层刀具有最好的切削性能,其切削距离比无涂层刀具提高4倍多.这主要因为Ti0.50Al0.50N涂层表面致密、硬度高,在钛合金切削时形成的切屑瘤致密而整齐.
The Ti1-xAlxN coatings with different Al contents were prepared by magnetron sputtering. The results of XRD, SEM, EDX and nano-indentation analysis showed that when the Al content is between 0.50 and 0.58 (atomic fraction), Ti1 -xAlxN coating is the fcc structure that preferentially grows (111) .When the content of Al is increased to 0.63, AlN of hexagonal wurtzite structure is formed in the coating, and the hardness of the coating decreases.With the increase of Al content, The particle size of the coating surface became larger and the coating became loose.The cutting experiments of titanium alloy showed that the wear patterns of the coated cutting tools were mainly bond wear and chipping.When cutting at low speed (65 m / min), Ti0.50Al0.50N The cutting performance of the layer tool is slightly better than that of the uncoated tool and better than that of the Ti0.42Al0.58N and Ti0.37Al0.63N coated tools. At high speed cutting (100 m / min), the Ti0.50Al0.50N coating The cutting tool has the best cutting performance and the cutting distance is more than 4 times higher than that of the uncoated tool.This is mainly because the surface of the Ti0.50Al0.50N coating has a dense surface and high hardness and the formed chip tumors are compact and neat when the titanium alloy is cut.