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采用溶胶凝胶法在不锈钢基片上沉积N iO薄膜。考察溶胶粘度对薄膜形貌的影响,并利用热重-差热分析、扫描电子显微镜、X射线衍射等对前驱体热分解行为、薄膜形貌和结构进行了表征。结果表明:直接以聚丙烯酸(PAA)为螯合剂,醋酸镍为镍源,去离子水为溶剂合成了均匀稳定的溶胶,随着溶胶粘度的降低获得的N iO薄膜表面更加光滑致密;在烧结过程中,干凝胶前驱体于450℃已经基本完全分解并逐渐形成晶体N iO;随烧结温度升高,N iO薄膜表面颗粒大小增加,结构更加完善;经500℃烧结2 h时获得了结晶度高,结构致密的N iO薄膜,有望成为高性能薄膜锂离子电池的阳极材料。
Nio films were deposited on a stainless steel substrate by sol-gel method. The effects of sol viscosity on the morphology of the films were investigated. The thermal decomposition behavior, morphology and structure of the films were characterized by TG-DTA, SEM and X-ray diffraction. The results show that the surface of N iO thin film is more smooth and dense with polyacrylic acid (PAA) as chelating agent, nickel acetate as nickel source and deionized water as solvent, and the surface of N iO thin film becomes more smooth and dense with the decrease of sol viscosity. In the process, the precursor of xerogel has been completely decomposed at 450 ℃ and gradually form crystal NiO. With the increase of sintering temperature, the particle size of NiO film increases and the structure is more perfect. Crystallization is obtained at 500 ℃ for 2 h High degree, compact structure of NIO film, is expected to become a high-performance thin film lithium-ion battery anode material.