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本文应用四极质谱计的工作原理来分析真空贮槽残余气体成分,科学地相对确定容器处于放气、泄漏的不定状态及残余气体的主要成分,从而提高产品质量和生产效率。图8表1参4。
In this paper, the working principle of quadrupole mass spectrometer is used to analyze the composition of residual gas in vacuum storage tank. Scientifically determine the container is in deflation, leakage of the indefinite state and the main components of residual gas to improve product quality and production efficiency. Figure 8 Table 1 reference 4.