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Different photoluminescence (PL) spectra are observed for rf magnetron sputtered polycrystalline Mg0.25Zn0.75O and Mg0.37Zn0.63O films on silicon substrates when excited by different wavelengths. When the excitation wavelength is 280nm, a UV emission peak at 370nm and a blue peak at 462nm are generated for the Mg0.25Zn0.75O film, and those two peaks for the Mg0.37Zn0.63O film shift to 366 nm and 466 nm, respectively. The wavelengths of the PL peaks are related to the excitation wavelength. The stronger peak is obtained in the blue band due to a large number of oxygen vacancies caused by excess Zn and Mg atoms, while the weaker peak is obtained in the ultraviolet band.